Diffusion Furnace | Semiconductor & Vacuum Furnace Manufacturer

About Qingdao Yuhao Microelectronics

Established in 2008, Qingdao Yuhao Microelectronics Equipment Co., Ltd. is a nationally recognized high-tech enterprise integrating research and development, manufacturing, and sales. We specialize in advanced diffusion furnaces, oxidation furnaces, vacuum sintering systems, and graphite mold processing for the semiconductor, solar photovoltaic, and crystal materials industries.

As a certified ISO 9001 company, we maintain a standardized quality management system and continuously innovate to meet the evolving demands of high-tech manufacturing. Our export-ready solutions are trusted by clients worldwide.

ISO 9001 Certified Quality Management
R&D, Manufacturing & Sales Integration
Export Business Rights
Custom Engineering & Non-Standard Solutions

Why Choose DiffusionFurnace.com?

We combine innovation, quality, and customer-centric service to deliver reliable thermal processing solutions.

Semiconductor-Grade Precision

Engineered for integrated circuits, discrete devices, and power semiconductors with tight temperature uniformity and process repeatability.

End-to-End Manufacturing

From R&D to production and delivery, we control every stage to ensure quality, compliance, and on-time performance.

Customization & Flexibility

We offer non-standard and customized furnace designs tailored to your specific process requirements and factory layout.

Our Product Range

High-performance thermal processing systems for semiconductor, solar, and advanced materials manufacturing.

Vertical Diffusion Furnace

Used in ICs, discrete devices, power semiconductors, and solar cells. High throughput with excellent temperature uniformity.

• Vertical Load Design
• Multi-Zone Control
• High Purity Quartz Tube

Vertical Oxidation Furnace

Ideal for gate oxide growth, field oxidation, and passivation layers in semiconductor fabrication.

• Dry/Wet Oxidation Modes
• Precise O2/H2O Control
• Low Particle Generation

Vertical Annealing Furnace

Used for dopant activation, defect recovery, and metal silicidation in advanced CMOS processes.

• Rapid Thermal Processing
• N2, O2, H2 Atmospheres
• High Temperature Stability

Vertical Vacuum Diffusion Furnace

Enables high-purity diffusion under vacuum or inert gas, minimizing contamination.

• Vacuum Sealing System
• Leak Rate < 5x10⁻⁹ mbar·L/s
• High-Temp Graphite Heaters

Vertical LPCVD Furnace

Low-pressure chemical vapor deposition for SiO₂, Si₃N₄, and polysilicon films with excellent step coverage.

• 0.1–10 Torr Operation
• High Deposition Uniformity
• Automated Process Control

Horizontal Diffusion Furnace

Traditional batch processing with high capacity and stable temperature zones for large wafers.

• Front-Loading Design
• 3–5 Zone Heating
• High Throughput

Horizontal Oxidation Furnace

Reliable oxidation processing with precise gas flow and temperature control for consistent oxide layers.

• Dry/Wet Oxidation
• PID Temperature Control
• Corrosion-Resistant Components

Chain Furnace

Continuous processing for sintering, brazing, and heat treatment with automated conveyor system.

• Continuous Throughput
• Adjustable Speed Control
• Multiple Atmosphere Options

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Our Engineering Excellence

ISO 9001 Certified

Rigorous quality control from design to delivery ensures reliability and compliance.

High Efficiency

Optimized thermal design reduces energy consumption and operating costs.

Custom Solutions

Non-standard and tailored furnace designs to match your production needs.

Global Support

Export-ready systems with technical support and installation assistance.

Frequently Asked Questions

What industries use your diffusion furnaces?

Our furnaces are used in semiconductor manufacturing, solar photovoltaics, LED production, crystal growth, and advanced materials research.

Do you offer custom furnace designs?

Yes, we specialize in non-standard and customized furnace solutions tailored to specific process requirements, wafer sizes, and factory layouts.

What certifications do you hold?

We are ISO 9001 certified and hold national high-tech enterprise status in China with full import-export rights.

What is the delivery time for standard models?

Typical delivery is 6–10 weeks after order confirmation, depending on model and customization level.

Do you provide installation and training?

Yes, we offer remote and on-site support, including installation guidance, operator training, and process optimization.

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Precision Diffusion & Vacuum Furnaces for Advanced Semiconductor Manufacturing