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Precision Thermal Control for Semiconductor Testing

LNEYA designs and manufactures advanced thermal test chillers and temperature control systems for semiconductor production, testing, and R&D applications. From -100°C to +350°C, we deliver reliability, precision, and innovation.

LNEYA Thermal Facility

About LNEYA Thermal

A trusted leader in industrial temperature control solutions, LNEYA specializes in ultra-low and high-temperature systems for semiconductor, data center, and advanced manufacturing applications.

50+

Patent Achievements

12,000㎡

Production Workshop

2000+

Customized Products

200,000

Global Sales

Corporate Excellence

LNEYA is an enterprise specializing in the research and development, production, and sales of industrial chillers and temperature control equipment. With extensive experience in ultra-low temperature and high-temperature systems, we serve clients across the semiconductor, electronics, and advanced materials industries. Our commitment to innovation, quality, and customer support has earned us numerous corporate honors and global recognition.

Our Product Range

Engineered for precision, durability, and performance in demanding industrial environments.

FLT Series Chiller

FLT Series Chiller

Temperature range: 5℃~40℃, -25℃~40℃, -45℃~40℃, -100℃~+80℃

  • Reverse cascade cooling technology
  • Ideal for semiconductor testing
  • High stability and energy efficiency
TES Cooling Heating Circulator

TES Circulator

Temperature range: -45℃~+250℃, -60℃~+200℃, -85℃~+200℃

  • Heating and cooling integration
  • Fast dynamic temperature control
  • Used in vacuum chamber temperature management
LTS Fluoride Temperature Control

LTS Fluoride System

Temperature range: -20℃~35℃, -40℃~80℃, -60℃~80℃, -80℃~80℃

  • Fluorinated liquid compatibility
  • Corrosion-resistant design
  • Perfect for sensitive semiconductor processes
ETCU Heat Exchange System

ETCU Heat Exchange System

Temperature range: +5℃~90℃

  • No compressor design
  • Energy-efficient and quiet
  • Ideal for cleanroom environments
Gas Cooling Chiller

Gas Cooling Chiller

Designed for gas condensation and recovery systems

  • Liquefies exhaust gases
  • Integrated collection tank
  • Used in etching and thin film deposition
Coolant Distribution Unit (CDU)

Coolant Distribution Unit (CDU)

Centralized cooling for multiple tools

  • Water or air-cooled options
  • Modular design for scalability
  • Supports high-precision processes
Temperature Forcing System

Temperature Forcing System

Rapid thermal cycling for testing

  • Dynamic temperature control
  • Used in burn-in and aging tests
  • Supports -120°C to 350°C
Thermal Chuck System

Thermal Chuck System

Includes chuck and temperature control unit

  • Precise wafer temperature control
  • Uniform thermal distribution
  • Compatible with lithography and etching

Applications in Semiconductor Manufacturing

Diffusion Process

Precise temperature control for dopant diffusion and annealing.

Lithography

Thermal stability for photomask alignment and exposure.

Etching

Cooling for plasma and chemical etching systems.

Ion Implantation

Thermal management for ion beam equipment.

Thin Film Deposition

Temperature control for CVD, PVD, and ALD processes.

Waste Gas Treatment

Gas condensation recovery and exhaust cooling.

Data Center Cooling

Liquid cooling solutions up to 300kW per cabinet.

Material Testing

Low/high-temperature aging and reliability testing.

Why Choose LNEYA?

  • Ultra-Wide Range: From -152°C to +350°C for extreme thermal control.
  • Custom Solutions: OEM and explosion-proof customization available.
  • Global Support: Over 200,000 units sold worldwide.
  • Innovation: 50+ patents in temperature control technology.
  • Reliability: 24/7 operation with high-performance pumps and controls.
LNEYA System Diagram

Frequently Asked Questions

What temperature ranges do LNEYA chillers support?

Our chillers support from -152°C to +350°C, including ultra-low and high-temperature models for semiconductor and industrial applications.

Can LNEYA provide custom solutions?

Yes, we offer OEM, explosion-proof, and customized recirculating chillers tailored to your process requirements.

Are LNEYA chillers suitable for cleanrooms?

Yes, our ETCU and other models are designed for low-noise, high-reliability operation in cleanroom environments.

Do you support data center liquid cooling?

Yes, we offer cold plate (15kW) and cabinet-level (300kW) liquid cooling solutions for high-density data centers.

How can I request a quote?

Visit lneyathermal.com and use the contact form or email us directly.

Get in Touch

Reach out for product inquiries, quotes, or technical support.

Contact Information

Email: [email protected]

Phone: +86 18751545184

WhatsApp: +86 13912479193

Address: No. 203, Hongyun Road, Jiguang Industrial Park, Xinwu District, Wuxi City, China

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